Tender Details

Country: Netherlands
Summary: Xuv Piezo Cluster
NLT Ref No: 109928005
Deadline: 13 Jan 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: EUR 1900000
Notice Type: Tender
Document Ref. No.: 683630-2024
Purchaser's Detail:
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Description:
The XUV Optics Group in MESA+ Institute at University of Twente tends to invest in the XUV Piezo Cluster to carry research on piezoelectric film-based sensors and actuators. The aim is to scale up the piezoelectric film coating capabilities to larger substrate dimensions with more advanced process control systems that enable to explore a broader process window. The XUV Piezo Cluster will be used for the deposition of pure metals, metallic oxides and piezoelectric layers onto various substrates to be further processed using photolithography and deposition steps in the MESA+ Nanolab facilities. Brief description of the capabilities is outlined below: The XUV Piezo Cluster shall be capable of processing at least 200 mm diameter substrates. The XUV Piezo Cluster shall include a chamber for deposition of piezoelectric Pb(Zr,Ti)O3 (PZT) layer that acts as the active layer for sensor and actuator applications. The XUV Piezo Cluster shall include a chamber or chambers for deposition of pure metals such as Pt, gold (Au) or conductive metal oxides such as LaNiO3 or SrRuO3 layers. The XUV Piezo Cluster shall have the capability to sputter the typically used Ti, Ta or Cr adhesion layers preceding the pure metal layers. The XUV Piezo Cluster shall include a load-lock chamber for fast sample loading and reaching of the base pressure. The XUV Piezo Cluster shall include a transfer chamber enabling the transfer of substrates between deposition chambers without breaking the vacuum....
Documents:

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Xuv Piezo Cluster - Netherlands Tender

The UNIVERSITEIT TWENTE, a Government sector organization in Netherlands, has announced a new tender for Xuv Piezo Cluster. This tender is published on NetherlandsTenders under NLT Ref No: 109928005 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-01-13.

The estimated tender value is EUR 1900000, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.