Tender Details

Country: Netherlands
Summary: New Ibe-Ribe Tool Mesa+ Nanolab
NLT Ref No: 70267277
Deadline: 28 Sep 2022
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: EUR 1200000
Notice Type: Tender
Document Ref. No.: 440644-2022
Purchaser's Detail:
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Description:
Document Type : Contract notice
Title : New IBE-RIBE tool MESA+ NanoLab
Reference Number : EB 0ut 5579
Contract Type : Supplies
Estimated Value : 1200000 - EUR
Description : he MESA+ Institute for Nanotechnology will invest in a new ion beam etch tool (IBE/RIBE) to reinforce their state-of-the-art etch capabilities. The tool will be used for etching thin films in the platforms: electronics, MEMS, fluidics, optics and 3-D nano-shaping. The tool must be equipped with a RF-ICP plasma source and a SIMS end-point detection to enable an accurate pattern transfer at micro (nano) scale in metals, dielectric materials, and organic materials.
The tool must be capable to demonstrate a large process (etch) window, which is controlled by the tilt angle of the substrate holder, the rotation speed, the beam energy and the gases argon, oxygen, and nitrogen. The tool must be able to etch at low energies (i.e., 60 ev beam energy) without losing its uniformity. the tool must be capable to run 100 mm and 150 mm wafers.

38000000 - Laboratory, optical and precision equipments (excl. glasses)
Authority Type : Body governed by public law
Type of Procedure : Open procedure
Regulation : European Union
Bid Type : Submission for all lots
Doc Title : Laboratory, optical and precision equipments (excl. glasses)
Dispatch Date : 2022-08-10
Publish Date : 2022-08-12
Submission Date : 2022-09-28
Documents:

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New Ibe-Ribe Tool Mesa+ Nanolab - Netherlands Tender

The UNIVERSITEIT TWENTE, a Government sector organization in Netherlands, has announced a new tender for New Ibe-Ribe Tool Mesa+ Nanolab. This tender is published on NetherlandsTenders under NLT Ref No: 70267277 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2022-09-28.

The estimated tender value is EUR 1200000, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.